Quality Assessment of Variable Reflectivity Laser Mirrors with High Laser –Induced Damage Threshold and Structural Analysis

Document Type : Articles

Authors

Faculty of Applied Sciences. Malek- Ashtar University of Technology. Iran

Abstract

Abstract:
We report the results of an experimental study on the fabrication of a multilayer variable reflectivity laser mirror and the morphological analysis of optical thin film layers. In a design procedure, a series of variable reflectivity laser mirrors are fabricated and characterized with different methods. In this research, based on pulsed solid-state Nd:YAG lasers at 1064 nm, two types of variable reflectivity laser mirrors with (HfO2/SiO2) and (ZrO2/SiO2) materials are fabricated by electron beam evaporation method. The central reflectivity of R0 =30 and 35 % for two super Gaussian orders of n=3 and 4 is manufactured and qualified by ellipsometry and laser beam scan methods. The Laser-induced damage threshold experiments demonstrated that, the VRMs with multilayers of HfO2/SiO2, have a higher Laser-induced damage threshold than ZrO2/SiO2, which was 10 J/cm2 and 7 J/cm2, correspondingly. Also, in a novel and exact FESEM approach, the morphological structure of the VRM thin layers was monitored which gives a deeper insight into the layer structure and helped us to calibrate the PVD device for shaped VRM.

Keywords


  1. Morin and M. Poirier, Graded reflectivity mirror unstable laser resonator design, Optical and Quantum Electronics., 29 (8). (1997) 819-866. Available doi:10.1117/12.308125 .
  2. Zizzo, C. Arnone, C. Call and S. Sciortino, Fabrication and characterization of tuned Gaussian mirrors for the visible and the near infrared. Opt. Lett., 13(5), (1988) 342-344, Available doi:10.1364/ol.13.000342.
  3. Emiliani et al, Optical coatings with variable reflectance for laser mirrors, App.optics., 28 (1989) 2832-7, Available doi:10.1364/AO.28.002832
  4. Nikolov et al, High-power Nd: YAG laser with variable reflectivity mirrors, International Society for Optics and Photonics., 4397 (2001) 49-53, Available doi:10.1117/12.425158.
  5. Mahdieh M. Shirmahi and M. Lafooti, Investigation of variable reflecting mirrors effects in beam quality of unstable optical resonators, International Society for Optics and Photonic., 6346(2007) 63461-5, Available doi:10.1117/12.738863.
  6. Generalov et al, High-power CO2 laser with VRM unstable resonator: beam quality control and characterization, International Society for Optics and Photonics., 4165 (2000) 210, Available: https://www.researchgate.net/publication/253568985_High-power_CO2_laser_with_VRM_unstable_resonator_beam_quality_control_and_characterization
  7. Duplain et al., Graded-reflectance mirrors for beam quality control in laser resonators App. Optics., 32 (1993) 1145-1153, Available doi:10.1364/OAM.1991.TuDD4.
  8. Eghbalifar H. Izadneshan   G. Solookinejad,  L. Separdar, The influence of substrate preparation conditions on the Raman spectra of In2S3 thin films prepared by physical vapor deposition, JOPN., 7 ( 2022) 51-62, Available doi: 10.30495/JOPN.2022.29862.1256  
  9. Liu, Y. Zheng, F. Pan, Z. Wang, J .Wang, Q. Xu, Effect of 1064 nm laser conditioning on damage morphology change process on HfO2/SiO2 reflective film, Infrared and Laser Engineering., 46 (2017)6060031-7, Availabledoi:10.3788/irla201746.0606003 .
  10. Dai, Y. Chen, J. Lu, Z. Shen, X. Ni, Chin. Analysis of laser induced thermal mechanical relationship of HfO2/SiO2 high reflective optical thin film at 1064 nm, Opt. Lett., 7(2009)601-604, Available: https://opg.optica.org/col/abstract.cfm?uri=col-7-7-601.
  11. R. Kozlovski, Large area laser conditioning of dielectiic thin film mirrors Proc. SPIE., 1438 (1990)143811-17, Available doi:10.1117/12.2294446.
  12. Zhang, S. Fan, Y. Zhao, W.Gao, J. Shao, R. Fan, Y. Wang,   Z. Fan, High laser-induced damage threshold HfO2 films prepared by ion-assisted electron beam evaporation, Applied Surface Science., 243, (2005)232-237, Available doi:10.1016/j.apsusc.2004.09.083.
  13. Reicher, M. Navarro, R. Sydenstricker, J. Oberling, M. Marquez, J .Villafuert, A Ogloza , J. Pentony, P .Langston, D. O'Conner, D. Marrs, Damage thresholds of HfO2/SiO2 and ZrO2/SiO2 high reflectors at 1.064 microns deposited by reactive DC magnetron sputtering, Proc. SPIE., 5647 (2005) 26-32, Available doi:10.1117/12.583022 .
  14. Alvis, M. Giulio, S. Di Marrone, G Perrone, M. R. Protopapa, M. L. Valentini, and L. Vasanelli, HfO2 films with high laser damage threshold thin solid films ,Thin Solid Films., 358 (2000)250-258, Available doi:10.1016/S0040-6090(99)00690-2.
  15. Smalakys, E. Drobužaite, B. Momgaudis, R. Grigutis, and A.Melninkaitis, Quantitative investigation of laser induced damage fatigue in Hf2o and Zro2, Optics Express., 28 (2020)25335-45, Available: doi:10.1364/OE.397812 .
  16. Jena, R. Bahadur. Tokas, K. Divakar. Rao, S. Thakur, N. Kishore S, annealing effect on microstructure and laser induced damage threshold of HfO2/ZrO2 multilayer mirrors, App. Opt., 55 (2016) 6108-6114 Available: doi. 10.1364/AO.55.006108 .
  17. Jiao, T. Ding, Q. Zhang, comparative study of laser induced damage of HfO2/ZrO2 mirrors at 1064nm,Opt. Express., 19 (2011) 4059-4066, Available: doi:10.1364/OE.19.004059 .
  18. Falmbigl, K. Godin, J. George,C. Mühlig, B. Rubin, effect of annealing on preparation and performance of HfO2/ZrO2 optical coating on UV applications, Opt. Express. 30 (2022) 12326- 12336, Available doi: 10.1364/OE.453345
  19. Z. Tafti, M. B. Zarandi, H. A. Bioki, Thermal Annealing Influence over Optical Properties of Thermally Evaporated SnS/CdS Bilayer Thin Films, JOPN., 4 (2019) 87-98, Available doi:  20.1001.1.24237361.2019.4.1.6.4
  20. bagheri, H. amini, S. raayati, ZrO2 Nanoparticles: Optical Properties of Tetragonal Phase and Enhanced Photocatalytic Activity, JOPN., 5(2020) 13-24, Available doi:20.1001.1.24237361.2020.5.2.2.9